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Surface Engineering Volume 22, 2006 - Issue 1
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Articles

Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

A. VyasAdvanced Coatings Applied Research Laboratory, Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong SAR, China
,
L. K. Y. LiAdvanced Coatings Applied Research Laboratory, Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong SAR, ChinaCorrespondence[email protected]
,
Z. F. ZhouAdvanced Coatings Applied Research Laboratory, Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong SAR, China
&
Y. G. ShenAdvanced Coatings Applied Research Laboratory, Department of Manufacturing Engineering and Engineering Management (MEEM), City University of Hong Kong, 83 Tat Chee Avenue, Kowloon, Hong Kong SAR, China
Pages 15-25 | Published online: 19 Jul 2013

Citations (7)

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Read on this site (2)

L. H. Yu, T. Huang & J. H. Xu. (2017) Microstructure, mechanical and tribological properties of TaCN composite films. Surface Engineering 33:1, pages 1-6.
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X. H. Zheng, J. P. Tu & R. G. Song. (2010) Effects of Temperature on Microstructure and Tribological Performance of a-CN Films Prepared by Pulsed Laser Deposition. Materials and Manufacturing Processes 25:5, pages 311-315.
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Articles from other publishers (5)

Dian Yu, Lihua Yu, Pei Jia, Hongbo Ju, Huang Luo, Junhua Xu & Shinji Koyama. (2020) Microstructure, mechanical and tribological properties of TaCN composite films by reactive magnetron sputtering. Ceramics International 46:13, pages 20683-20694.
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Gongsheng Song, Qiang Fu & Chunxu Pan. (2018) Direct Fractographic Evaluation of Multilayer CNx/TiN Films by Magnetron Sputtering. MRS Advances 3:18, pages 949-955.
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A.M. Abd El-Rahman. (2010) An investigation on the microstructure, tribological and corrosion performance of AISI 321 stainless steel carbonitrided by RF plasma process. Surface and Coatings Technology 205:2, pages 674-681.
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A. Vyas, Y.H. Lu & Y.G. Shen. (2010) Mechanical and tribological properties of multicomponent Ti?B?C?N thin films with varied C contents. Surface and Coatings Technology 204:9-10, pages 1528-1534.
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Anand Vyas, K.Y. Li & Y.G. Shen. (2009) Influence of deposition conditions on mechanical and tribological properties of nanostructured TiN/CNx multilayer films. Surface and Coatings Technology 203:8, pages 967-975.
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