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Interdisciplinary Science Reviews Volume 18, 1993 - Issue 3: Interdisciplinary High Technology at Karlsruhe Nuclear Research Centre (Kernforgschungszentrum Karlsruhe)
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Microsystems Technology

Microspectrometer Fabricated by the Liga Process

C. MüllerInstitute for Microstructure Technology Karlsruhe Nuclear Research Centre (KfK), Germany
&
J. MohrInstitute for Microstructure Technology Karlsruhe Nuclear Research Centre (KfK), Germany
Pages 273-279 | Published online: 18 Jul 2013

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S. Traut, M. Rossi & H.P. Herzig. (2000) Replicated arrays of hybrid elements for application in a low-cost micro-spectrometer array. Journal of Modern Optics 47:13, pages 2391-2397.
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Articles from other publishers (24)

Amardeep Bharti, Alessio Turchet & Benedetta Marmiroli. (2022) X-Ray Lithography for Nanofabrication: Is There a Future?. Frontiers in Nanotechnology 4.
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Hartmut Hillmer, Carsten Woidt, André Istock, Aliaksei Kobylinskiy, Duc Toan Nguyen, Naureen Ahmed, Robert Brunner & Thomas Kusserow. (2021) Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers. Nanomaterials 11:1, pages 164.
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Jun Shi, Yuan-Shen Huang, Li-Na Peng, Zheng-Ji Ni & Da-Wei Zhang. (2020) Grating/microlens arrays fabricated by hot-melting, self-assembly and replication. Optical Materials 104, pages 109733.
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Do Ngoc Hieu, Dang Nguyen Ha My, Vu Thi Thu, Nguyen Quoc Hung, Do Ngoc Chung & Nguyen-Tran Thuat. (2017) Selected-area growth of nickel micropillars on aluminum thin films by electroless plating for applications in microbolometers. Journal of Science: Advanced Materials and Devices 2:2, pages 192-198.
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P. Meyer & J. Schulz. 2015. Micromanufacturing Engineering and Technology. Micromanufacturing Engineering and Technology 365 391 .
Jürgen Mohr. 2008. LIGA and Its Applications. LIGA and Its Applications 205 232 .
Mathias Heckele & Matthias Worgull. 2008. LIGA and Its Applications. LIGA and Its Applications 69 102 .
Elena Reznikova, Juergen Mohr, Martin Boerner, Vladimir Nazmov & Peter-Juergen Jakobs. (2008) Soft X-ray lithography of high aspect ratio SU8 submicron structures. Microsystem Technologies 14:9-11, pages 1683-1688.
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Koichi Awazu, Makoto Fujimaki, Xiaomin Wang, Akihide Sai & Yoshimichi Ohki. (2011) Fabrication of two-dimensional photonic structure of titanium dioxide with sub-micrometer resolution by deep x-ray lithography. MRS Proceedings 820.
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C. Solf, J. Mohr & U. Wallrabe. (2003) Miniaturized LIGA Fourier transformation spectrometer. Miniaturized LIGA Fourier transformation spectrometer.
Toru Oka, Hajime Nakajima, Masahiro Tsugai, Uwe Hollenbach, Ulrike Wallrabe & Jürgen Mohr. (2003) Development of a micro-optical distance sensor. Sensors and Actuators A: Physical 102:3, pages 261-267.
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Toru Oka, Hajime Nakajima, Akihide Shiratsuki, Masahiro Tsugai, Ulrike Wallrabe, Uwe Hollenbach, Peter Krippner & Jürgen Mohr. 2001. Transducers ’01 Eurosensors XV. Transducers ’01 Eurosensors XV 536 539 .
F. J. Pantenburg. (1998) Influence of developer temperature and resist material on the structure quality in deep x-ray lithography. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 16:6, pages 3547.
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Dietmar Sander, Oliver Blume & J?rg M?ller. (1996) Microspectrometer with slab-waveguide transmission gratings. Applied Optics 35:21, pages 4096.
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H. Staerk, A. Wiessner, C. Müller & J. Mohr. (1996) Design considerations and performance of a spectro-streak apparatus applying a planar LIGA microspectrometer for time-resolved ultrafast fluorescence spectroscopy. Review of Scientific Instruments 67:7, pages 2490-2495.
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H. Bartelt. 1995. Sensors Set. Sensors Set 259 274 .
Helmut Teichmann. 1995. Sensors Set. Sensors Set 221 258 .
H.-J. Ache, J. Brck, W. Faubel, W. Hoffmann, J. Reichert, W. Menz, B. Bstgens, J. Mohr, C. Mller, W. Schomberg & M. Strohrmann. 1995. Sensors Set. Sensors Set 78 133 .
H. Bartelt. 1995. Sensors. Sensors 259 274 .
Helmut Teichmann. 1995. Sensors. Sensors 221 258 .
H.‐J. Ache, J. Bürck, W. Faubel, W. Hoffmann, J. Reichert, W. Menz, B. Büstgens, J. Mohr, C. Müller, W. Schomberg & M. Strohrmann. 1995. Sensors. Sensors 79 133 .
F.J. Pantenburg & J. Mohr. (1995) Influence of secondary effects on the structure quality in deep X-ray lithography. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 97:1-4, pages 551-556.
Crossref
W. Menz, W. Bacher, W. Bier, O. F. Hagena, J. Mohr & D. Seidel. (1995) Combination of LIGA with other microstructure technologies. Microsystem Technologies 2:1, pages 162-166.
Crossref
Wolfgang Menz & Jürgen Mohr. 1995. Forschung mit Röntgenstrahlen. Forschung mit Röntgenstrahlen 577 589 .

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