Characteristics of DLC/oxynitriding duplex-treated V8 tool steel by DC-pulsed PECVD

ABSTRACT

In this paper, DLC films are produced by DC-pulsed plasma enhanced CVD after oxynitride-treating of Vanadis 8 tool steel. The experimental parameters include various Ar gas flows (1, 1.5, 2 and 2.5 sccm) with asymmetric bipolar pulsed voltages, the gas flow of CH₄ and a deposition time of 90 min, respectively. The experimental results showed that optimal properties occurred at an appropriate argon gas flow of 1.5 sccm. The wear tests showed the lowest wear loss volume when loads of 2 and 5 N were 3.81 × 10⁻³ and 4.01 × 10⁻³mm³, respectively. Meanwhile, the hardness of the DLC film was 17.78 GPa and the elastic modulus was 191.63 GPa, respectively. Moreover, the water contact angle was 78.11°, which indicated that the DLC films could make Vanadis 8 tool steel more hydrophobic.

KEYWORDS:

• DLC
• DC-pulsed plasma enhanced CVD
• oxynitride
• Vanadis 8 tool steel
• hydrophobic

Disclosure statement

No potential conflict of interest was reported by the authors.

Additional information

Funding

The experimental equipment is supported by the Department of Chemical and Material Engineering Lunghwa University of Science and Technology and ASSAB STEELS TAIWAN CO, LTD .