https://orcid.org/0000-0003-4628-059X
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ABSTRACT
This paper presents the design, fabrication, and characterization of a two-axis tilt angle sensor based on the air/liquid two-phase dielectric capacitive sensing structure. The sensor consists of five electrodes, one serves as the exciting electrode and two pairs of electrodes as sensing ones, which are arranged at identical positions surrounding a glass cylinder tube. The glass cylinder tube is partly filled with dielectric liquid to form the air/liquid two-phase dielectric medium. Based on this arrangement, the proposed sensor can detect roll and pitch angles, simultaneously. A computational simulation and experimental measurements are performed to study the performance of the sensor. The numerical simulation is carried out with a finite element analysis using COMSOL. A prototype of the sensor was fabricated, and its performance was evaluated. The tilt angle sensor was employed on a printed circuit board with a conditioning circuit, consisting of a sine wave generator, pre-amplifiers, rectifiers, and low pass filters. The experiment results confirmed that the roll angle detection has a linear range in the range of −60° to +60° with non-linearity error of 6.6%. The sensitivity and resolution in this range are 18.2 mV/° and 0.55°, respectively. For pitch angle detection, the linear range is −16° to +16° with non-linearity of 10%, and sensitivity and resolution of 58.2 mV/° and 0.17°, respectively.
Acknowledgement
We would like to thank Mr Tran Ngoc Thanh for his supports in experiment, and Dr Trinh Chu Duc for his valuable discussions.
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Notes on contributors
Ha Tran Thi Thuy
Ha Tran Thi Thuy received the BS degree in physics from Hanoi University of Science, Hanoi, Vietnam, in 1998, the MSc degree in electrical engineering from Vietnam National University, Hanoi, in 2002. She currently holds a position as a PhD student in the Post and Telecommunications Institute of Technology. Her main research interests include the development of microfluidic technologies for living cell manipulation and detection. Email: [email protected]
Tiep Dang Dinh
Tiep Dang Dinh received the BS, MSc and PhD degrees in electrical engineering from Military Technical Academy, Hanoi, in 2004, 2007 and 2018, respectively. He currently is a researcher at the Military Institute of Science and Technology, Hanoi, Vietnam. His main research interests include signal processing, mechanical sensors and applications. Email: [email protected]
Tuan Vu Quoc
Tuan Vu Quoc received the BS degree in physics and the MSc degree in electrical engineering from Vietnam National University, Hanoi, in 2002 and 2004, respectively. He currently is a researcher of the Vietnam Academy of Sciences and Technology, Hanoi, Vietnam works for and holds a position as a PhD student in the VNU – University of Engineering and Technology, Hanoi, Vietnam. Email: [email protected]
Thinh Pham Quoc
Thinh Pham Quoc received the BS degree in physics and the MSc degree in electrical engineering from Vietnam National University, Hanoi, in 2010 and 2012, respectively. He currently is a lecturer at the Thai Nguyen University, Thai Nguyen, Vietnam. Email: [email protected]
Masahiro Aoyagi
Masahiro Aoyagi received the BE and DE degrees in electronic engineering from Nagoya Institute of Technology, Japan, in 1982 and 1991, respectively. He joined Electrotechnical Laboratory, Tsukuba, Japan, in 1982, and worked in the special section Josephson computer technology until 1994. He worked as a guest researcher in National Physical Laboratory, Teddington, UK, from 1994 to 1995. He was a group leader of High Density Interconnection Group, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Science and Technology (AIST) from 2000 to 2010. He is currently the Director of Collaboration Promotion Unit of Tsukuba Innovation Arena (TIA) Central Office, AIST. Email: [email protected]
My Bui Ngoc
My Bui Ngoc received the BS degree from Military Technical Academy, Hanoi in 1997 and PhD degree in electronics form the First Electrotechnical University (LETI), Russia in 2006. He has authored and co-authored over 25 scientific articles, and books. His research interests include radio-frequency-based measurement techniques, photovoltaic systems, and sensors and applications. Email: [email protected]
Van Thanh Dau
Van Thanh Dau received the BS degree in aerospace engineering from Hochiminh City University of Technology, Vietnam, in 2002, and the MSc and PhD degrees in micro-mechatronics from Ritsumeikan University, Japan, in 2004 and 2007, respectively. He has been with the Research Group, Sumitomo Chemical Company, Ltd., Japan since 2010, where he has been involved in integrated electrofluidodynamic systems. He has authored and co-authored over 100 scientific articles, 30 granted and pending patents. His research interests include microfluidics, nanoparticle generation, electrohydrodynamics, microsensors and microactuators. Dr Dau was a recipient of the Japan Society for the Promotion of Science Post-Doctoral Fellowship from 2007 to 2009. Email: [email protected]
Tung Thanh Bui
Tung Thanh Bui received the BS degree in electrical engineering from Vietnam National University, Hanoi (VNU) in 2004, and the ME and DEng degrees in science and engineering from Ritsumeikan University, Shiga, Japan, in 2008 and 2011, respectively. From 2011 to 2015 he was a Post-doctoral Researcher with the 3D Integration System Group, Nanoelectronics Research Institute (NeRI), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan. Currently, he is an assistant professor at the Faculty of Electronics and Telecommunication (FET), VNU – University of Engineering and Technology (UET), Hanoi, Vietnam.