Design and testing of a compliant mechanism-based XYθ stage for micro/nanopositioning

ABSTRACT

A compliant mechanism-based micro/nanopositioning stages are used to perform high precision motion in various fields. In recent years, researches proposed various methods to achieve the compliant mechanism. This article presents a design of XYθ micropositioning stage using parametrisation technique. Conceptual design of positioning stage is developed using a combination of simple four bars. This can take a single load for angular displacement of one side or double loading for linear displacement. All the four sides of the stage can take loads depending on the direction of displacement. Conceptual design is converted into a working model using a parameterisation technique in which geometrical parameter is determined. Numerical simulations are performed for single loading and double loading to estimate x, y and θ. A working model is fabricated using a wire EDM process and has been tested for actual and numerical results.

KEYWORDS:

• Compliant mechanism
• micro/nano manipulation
• positioning
• parameterisation
• FEM

Disclosure statement

No potential conflict of interest was reported by the authors.

Additional information

Funding

This work was supported by the Science and Engineering Research Board (SERB), India under Grant [ECR/2016/001938].

Notes on contributors

Banumurthy SP

Bhanumurthy S P, a Resesrch scholar pursuing his Ph.D. in School of Mechanical Engineering at Vellore Institute of Technology, Vellore, graduated in Mechanical Engineering from University of Madras and master's in CAD/CAM from VIT, Vellore. His research interests are Finite Element Analysis, Compliant mechanism design.

R. Bharanidaran

R.Bharanidaran, an Associate Professor in School of Mechanical Engineering at VIT, Vellore, graduated in Mechanical Engineering and master's in CAD from Anna University, India. In 2014, he obtained his Ph.D. from National Institute of Technology Tiruchirappalli, Inida for designing Compliant microgripper with multi-functions. His research interests are compliant mechanism design, biopsy device, prosthetics, flexure hinges and MEMS. He has published numerous articles in refereed journals and conference proceedings including Elsevier, Springer and in various reputed publishers.