Theoretical and Experimental Study of CMOS Chip Energy Basing on PSZT Ferroelectric Ceramic Phase Transition

Abstract

We have demonstrated the feasibility of ferroelectric ceramics micro power generator (MPG) supplying low power dissipation integrate circuit (IC) chip basing on Pb(Zr,Sn,Ti)O₃ (tin-modified and niobium-modified PZT95/5) phase transition under shock wave compression. MPG provided micro-pulse-power with transferred energy up to 1.60mJ and with low voltage pulse amplitude 51.8V. We demonstrated experimentally that the MPG-capacitor system can perform as an IC-chip micro-power-sources supplying circuit. A methodology was developed for theory analysis of the MPG-capacitor system. The experimental results were in a good agreement with the theory analysis results.

Keywords:

• Ferroelectric ceramic
• shock wave
• PSZT
• phase transition
• micro-power-generator

Acknowledgments

This work was supported by China Postdoctoral Science Foundation (Grant Nos. 200902050 and 20080440306). The shock wave experiments were skillfully assembled and conducted by Professor Zhang in State Key Laboratory of Explosion Science and Technology at Beijing Institute of Technology. And Professor Dong and Professor Chen in Shanghai Institute of Ceramics at Chinese Academy of Sciences provided PSZT samples and additional material characterizations.