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Ferroelectrics Volume 433, 2012 - Issue 1
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Original Articles

Femtosecond Infrared Laser Annealing of PZT Films on a Metal Substrate

N. Yu. Firsova Moscow State Technical University of Radioengineering, Electronics and Automation (MSTU-MIREA), Prospekt Vernadskogo 78, Moscow, 119454, Russia
,
E. D. Mishina Moscow State Technical University of Radioengineering, Electronics and Automation (MSTU-MIREA), Prospekt Vernadskogo 78, Moscow, 119454, Russia
,
A. S. Sigov Moscow State Technical University of Radioengineering, Electronics and Automation (MSTU-MIREA), Prospekt Vernadskogo 78, Moscow, 119454, Russia
,
S. V. Senkevich Ioffe Physical-Technical Institute of the Russian Academy of Sciences, Polytekhnicheskaya 26, St-Peterburg, 194021, Russia
,
I. P. Pronin Ioffe Physical-Technical Institute of the Russian Academy of Sciences, Polytekhnicheskaya 26, St-Peterburg, 194021, Russia
,
A. Kholkin Department of Ceramics and Glass Engineering & CICECO, University of Aveiro, Aveiro, 3810-193, Portugal
,
I. Bdikin Department of Ceramics and Glass Engineering & CICECO, University of Aveiro, Aveiro, 3810-193, Portugal
&
Yu. I. Yuzyuk Department of Physics, Southern Federal University, 5, Zorge Street, Rostov-on-Don, 344090, Russia
 show all
Pages 164-169 | Received 08 Apr 2012, Published online: 12 Sep 2012
 
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Abstract

The quazi-amorphous PbZrTiO2 (PZT) precursor film on a platinized silicon substrate is annealed by femtosecond laser at the wavelength falling into transparency band of PZT. Two areas are found within the laser spot: ferroelectric perovskite revealing strong hysteresis and coercivity in piezoelectric response and paraelectric with low piezoresponse and the absence of hysteresis and coercivity. Annealing takes place through platinum absorbing laser irradiation and acting as a heat source for transparent film on top of it.

Acknowledgments

Parts of this work were supported by the Russian Foundation for Basic Research, and the Ministry of Education and Science of Russian Federation (Center of Collective Users “UNO “Electronics”).

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