Abstract
The research on laser drilling of amorphous foils can promote the application of amorphous alloy in micro-machining. In this article, the effects of current, pulse width and defocusing amount on the quality of machined hole on Fe78Si9B13 amorphous alloy foils were analyzed by controlling the laser parameters. The experimental results showed that the hole diameter, remelting area (RMA) thickness and heat affected zone (HAZ) thickness increased obviously with the increase of current and pulse width. But high current caused serious erosion near the entrance of the hole and the taper of the machined holes increased with increasing pulse width. When the defocusing amount was 0, the hole diameter was the smallest and the forming quality of the machined hole was the best. Every parameter needs to be adjusted and coordinated to improve the quality of laser drilling.