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Ferroelectrics Volume 565, 2020 - Issue 1: Proceedings of the Joint Symposium of the Tenth International Conference of The Chinese Society of Micro-Nano Technology and Microsystems and Nanoengineering Summit 2019 (CSMNT2019 & MAN2019): Part IV of V
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Articles

Research on key processing parameters of parallel seam welding of micro crystal resonator based on simulation experiment

Jian HuSchool of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, Hubei Province, P. R. China; ;Key Laboratory of Hubei Province for Micro Nano Crystal Processing Technology, Zengdu Economic Development Zone, Suizhou, Hubei Province, P. R. ChinaCorrespondence[email protected] [email protected]
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Saiding XingSchool of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, Hubei Province, P. R. China;
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Xiaorong ShanKey Laboratory of Hubei Province for Micro Nano Crystal Processing Technology, Zengdu Economic Development Zone, Suizhou, Hubei Province, P. R. China
,
Xindong YuKey Laboratory of Hubei Province for Micro Nano Crystal Processing Technology, Zengdu Economic Development Zone, Suizhou, Hubei Province, P. R. China
&
Gangyan LiSchool of Mechanical and Electronic Engineering, Wuhan University of Technology, Wuhan, Hubei Province, P. R. China; ;Key Laboratory of Hubei Province for Micro Nano Crystal Processing Technology, Zengdu Economic Development Zone, Suizhou, Hubei Province, P. R. ChinaCorrespondence[email protected] [email protected]
Pages 88-98 | Received 01 Nov 2019, Accepted 30 Jan 2020, Published online: 28 Sep 2020
 
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Abstract

Parallel Seam Welding (PSW) is the most widely used processing technology in micro crystal resonator packaging. PSW processing involves multiple parameters, and the design of processing plan in actual production lacks theoretical guidance, induces in high experiment cost and low accuracy of experimental results. In order to improve the design efficiency of PSW processing plan, the simulation experiment is designed for studying the effect of key processing parameters. The processing parameters involved in the simulation experiment were determined by analyzing the PSW processing. An electrical, thermal, and force coupled simulation model aiming at the physical process involved in PSW processing was established based on ANSYS. The single-factor experiment based on simulation model was designed in order to determine the effect and the experiment range of PSW processing parameters. In order to obtain the key processing parameters, the significance of PSW processing parameter to the packaging quality was calculated based on orthogonal experiment.

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