An explanation of hillock growth in thin Al films

Abstract

Theoretical aspects of kinetics and transport phenomena during the hillocks formation and growth in thin Al films are discussed. Following the suggested methodology, the conceptual relationship of step by step linear and/or parabolic law for hillock volume changes ΔV with time t:(where n = 1 and/or ½; K is the changeable coefficient and (i) is the appropriate time sequence) is proposed.

Finally, using the experimental measurements from S. J. Hwang, Y. D. Lee, Y. B. Park, J. H. Lee, C. O. Jeong, and Y. C. Joo: Scripta Mater., 2006, 54, 1841–1846, illustrative calculation results of the proposed concept are presented.

Keywords:

• Al
• Thin films
• Hillocks
• Kinetics
• Transport phenomena

Acknowledgements

This work was financially supported by the Ministry of Education, Science and Technological Development of the Republic of Serbia.