Micro/Nanotribological and Mechanical Studies of TiN Thin-Film for MEMS Applications

Abstract

Micro/nanotribological and mechanical characterization of TiN film and single-crystal silicon was investigated. Hardness, friction, and wear properties of both materials were measured by a nanoindenter system. The results demonstrate the similarities and differences between both materials and show that TiN film has more preferable properties in hardness and wear resistance than those of single-crystal silicon. It is more likely that a methodology based on this study can be used for evaluating the quality of micro/nanofilms, and TiN film possesses desirable micro/nanotribological and mechanical characterization for MEMS applications.

Keywords:

• TiN Thin Films
• Single-Crystal Silicon
• Micro/Nanomechanical and Tribological Properties
• Microelectromechanical Systems (MEMS)

ACKNOWLEDGMENT

Project 50135040 supported by National Natural Science Foundation of China.

Presented at the STLE/ASME Tribology Conference in Ponte Verda Beach, Florida October 26-29, 2003

Final manuscript approved September 19, 2003

Review led by Jacqueline Kim

Notes

^a Measured at a normal load of 100 μ N for 3 cycles.

^b Measured at a normal load of 100 μ N.