Abstract
The authors present the results of an investigation into the dispersion kinetics of niobium and hafnium nanofilms with a thickness of 100 nm, deposited on the surface of specimens of aluminium oxide ceramics, sapphire and ceramics based on ZrO2 as a result of vacuum annealing at a temperature of 1300–1600°C with different holding times in the range of 2–20 min.