Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 95, 2007 - Issue 1
Submit an article Journal homepage
80
Views
0
CrossRef citations to date
0
Altmetric
SESSION F: MEMS, NEMS, PURPELECTRIC/IR, OPTOELECTRONIC MATERIALS

PYROELECTRIC LiTaO3 THIN FILMS ELABORATED BY RF MAGNETRON SPUTTERING WITH LI ENRICHED TARGET

L. NOUGARET Institut d'Electronique du Sud, Unité mixte de Recherche du CNRS n°5507 Université Montpellier II, Place E. Bataillon, 34095, Montpellier-France
,
P. COMBETTE Institut d'Electronique du Sud, Unité mixte de Recherche du CNRS n°5507 Université Montpellier II, Place E. Bataillon, 34095, Montpellier-France
&
F. PASCAL-DELANNOY Institut d'Electronique du Sud, Unité mixte de Recherche du CNRS n°5507 Université Montpellier II, Place E. Bataillon, 34095, Montpellier-France
Pages 44-53 | Received 15 Jun 2007, Accepted 30 Sep 2007, Published online: 20 Sep 2010
 
Sample our Physical Sciences journals, sign in here to start your FREE access for 14 days

ABSTRACT

LiTaO3 thin films were deposited by RF magnetron sputtering with a Li enriched target composed of Li2O2/Ta2O5 (55: 45 at %). LiTaO3 pyroelectric characteristics were studied with various gas compositions and with different bottom electrodes (RuO2 or Ru/RuO2). It can be seen that the LiTaO3 pyroelectric coefficient increases when the oxygen percentage decreases. Similar tests versus the back electrodes show the effect on pyroelectric properties of interface between LiTaO3 film and the bottom electrode. Ageing of pyroelectric coefficient are also presented and discussed. Finally, these results are compared with the pyroelectric coefficient values obtained with a stoichiometric target of Li2O2/Ta2O5 (50:50).

ACKNOWLEDGMENTS

The authors would like to thank V. Coronato, F. Cano, P. Pichot and J. Lionnet for their technical assistance.

Log in via your institution

Access through your institution

Log in to Taylor & Francis Online

Restore content access

Restore content access for purchases made as guest
Purchase options * Save for later

PDF download + Online access

  • 48 hours access to article PDF & online version
  • Article PDF can be downloaded
  • Article PDF can be printed
USD 61.00 Add to cart

Issue Purchase

  • 30 days online access to complete issue
  • Article PDFs can be downloaded
  • Article PDFs can be printed
USD 2,157.00 Add to cart

* Local tax will be added as applicable

Related Research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.