Fabrication and Characterization of PZT/CuO Thin Film

Abstract

Pb(Zr_0.52Ti_0.48)O₃ or PZT thin films embedded with CuO nano-particles were successfully prepared by a hybrid sol-gel process. In this process, CuO (0, 0.1, 0.2, 0.3, 0.4, 0.5 and 1wt%) nanopowder was suspended in an organometallic solution of PZT, and then coated on platinised silicon substrates using a spin-coating technique. X-ray diffraction patterns showed a perovskite phase in all the films. The CuO particles were not detected in the film, but the small amount of second phase was present when CuO concentration was above 0.4 wt%. The addition of CuO nano-particles also affected the orientation of PZT films. The CuO nano-particles were generally found to reduce both dielectric and ferroelectric properties of PZT films. However, at 0.2 wt% CuO concentration, the film exhibited good ferroelectric properties which were comparable to those of pure PZT thin films.

Keywords:

• PZT thin films
• CuO
• acceptor doped
• ferroelectric property

Acknowledgments

This work is financially supported by the Thailand Research Fund (TRF) and the National Research University Project under Thailand's Office of the Higher Education Commission (OHEC). The Faculty of Science and the Graduate School, Chiang Mai University is also acknowledged. T. Sreesattabud would also like to thank the OHEC for supporting a grant under the program Strategic Scholarships for Frontier Research Network for the Join Ph.D. Program Thai Doctoral degree.