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Integrated Ferroelectrics
An International Journal
Volume 150, 2014 - Issue 1
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Original Articles

Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator

Wenjing Liu School of Electronics Science and Engineering, Southeast University, Nanjing, China; Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA
,
Wenjun Liao Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA
,
Kemiao Jia Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA
,
Yiping Zhu Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA
,
Huikai Xie Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA
,
Baoping Wang School of Electronics Science and Engineering, Southeast University, Nanjing, China
&
Yongming Tang School of Electronics Science and Engineering, Southeast University, Nanjing, China
 show all
Pages 14-22 | Received 22 Mar 2013, Accepted 14 Sep 2013, Published online: 25 Feb 2014
 
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Abstract

This paper presents hysteresis property of tip-tilt-piston micromirror based on tilt-and-lateral shift-free piezoelectric unimorph actuator. The accuracy and the level of performance of piezoelectric actuator will be reduced for the reason of hysteresis behavior of piezoelectric device. To compensate the hysteresis behavior of the actuator, the properties should be researched and tested at first. The paper report the hysteresis behavior of micromirror with TLSF piezoelectric actuator under fixed frequency driving is stable with respect to the changes of the time and amplitude of driving voltage without considering the failure effect.

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