A Novel Sol-Gel Method of Preparation of the LiTaO₃ Thin Film and Its Property Research

Abstract

The dielectric constant and the dielectric loss of the LiTaO₃ thin film derived through the experimental method which is called the Sol-Gel method, as well as its pyroelectric constant and ferroelectric hysteresis loop are explored in the manuscript. In comparison, the dielectric constant and the dielectric loss of the annealed LiTaO₃ thin film derived from Pt(111)/SiO₂/Si(100) substrate are superior to which are derived from Fluorine-doped tin oxide substrate. The relationships among ferroelectric hysteresis loop and pyroelectric constant as well as temperature are measured. In room temperature, the dielectric constant of LiTaO₃ film is 45 at a frequency of 10 kHz, the dielectric loss is lower 0.006 than dielectric constant, The remanent polarization is 10.71 μC·cm⁻². The pyroelectric coefficient is 1.43×10⁻⁸ C·cm⁻²·K⁻¹ at 62 ^oC. This proves that the LiTaO3 thin films with high figures of merit (F_V = 0.56×10⁻¹⁰ C·cm·J⁻¹, F_D = 0.51×10–⁸ C·cm·J⁻¹) can be used widely in thermal detectors.

Keywords:

• LiTaO₃
• dielectric constant
• pyroelectric constant
• figures of merit