ABSTRACT
Thin films of BaSnxTi1-xO3 composition (Sn/Ti ≈50/50) are grown in-situ by RF magnetron deposition onto Pt/Ti/Al2O3 substrate. Structural and dielectric properties are optimized by changing substrate temperature. Best thin-film samples have shown a high tunability (about 3.5) and low dielectric losses attractive for microwave electronics.
Funding
The authors gratefully acknowledge the partial financial support of the Russian Foundation for Basic Research, research projects №13-02-12096 ofi-m and №15-02-99476 a.