Characterization of Lithium Tantalate (LiTaO₃) Film on the Concentration Variations of Ruthenium Oxide (RuO₂) Dope

Abstract

One of the ferroelectric materials that has a large potential to be developed is LiTaO₃ film_. LiTaO₃ film has been successfully produced by doping with RuO₂ concentrations of 0%, 2%, 4%, and 6% using the CSD (Chemical Solution Deposition) method with a spin coating technique at 8000 rpm and an annealing temperature of 850° C. Samples were characterized using UV-Vis Spectrophotometry, SEM, XRD, and EDX. The film thicknesses at dope concentrations of 0%, 2%, 4%, and 6% 0.2681 µm, were 0.2234 µm, 0.2234 µm, and 0.5078 µm, respectively, with bandgap energy levels of 2.38 eV, 2.29 eV, 2.04 eV, and 2.47 eV. The lattice parameters obtained were a = 5.098961 Å and c = 14.316897 Å (0% RuO₂), a = 5.065135 Å and c = 14.058488 Å (2% RuO₂), a = 5.069937 Å and c = 114.275256 Å (4% RuO₂), and a = 5.058727 Å and c = 14.253829 Å (6% RuO₂) causing the crystal structure to be hexagonal (α = β = 90° and γ = 120°) with crystal sizes for each film 0.258 µm, 0.285 µm, 0.295 µm, and 0.36 µm.

Keywords:

• CSD
• bandgap energy
• LiTaO₃
• RuO₂ dope

Additional information

Funding

We gratefully acknowledge the funding 129/SP2H/PTNBH/DRPM/2018 from the Kementerian Riset, Teknologi dan Pendidikan Tinggi, Republic of Indonesia through “Hibah Penelitian Dasar Unggulan Perguruan Tinggi” grant 2019 and we also gratefully acknowledge the funding from United States Agency for International Development through Sustainable Higher Education Research Alliances program Center for Development of Sustainable Region (CDSR) 2018.