Abstract
The low-fired Mg4Nb2O9 ceramics were fabricated by a solid-state reaction method for developing LTCC applications. By addition LiF as sintering aid, the sintering temperatures of Mg4Nb2O9 ceramics were successfully lowered to 950 °C due to the substitution of F- for O2−. The oxygen bond strength could be weakened by the substitution of F− for O2−, which reduced the intrinsic sintering temperature and facilitated the diffusion process. The microwave dielectric properties of ɛr = 12.3, Q × f = 62450 GHz, τf = −57.5 ppm/°C were obtained for Mg4Nb2O9-4 wt.% LiF ceramics, which suitable for LTCC applications.