Fabrication and Simulation of Shell Diamond Film

Abstract

Shell diamond film prepared using DC plasma jet CVD (DCPJCVD) is studied by those techniques. The relationships between morphology, microstructure, and the quality of diamond film are investigated by scanning electron microscopy, X-ray diffraction and Raman spectroscopy, respectively. The results show that, high nucleation density was attained when molybdenum substrate was polished by different size diamond powder and was etched by atom hydrogen. Diamond film grows in the columnar way, and the microstructure of diamond film is compact, continuous, and uniform. (111) faces were dominant in polycrystalline texture diamond film. Raman spectrum indicates that there is only diamond characteristic peak in shell diamond film, furthermore, the velocity, pressure, and temperature fields of reaction chamber were simulated by finite element methods, which help to prepare high-quality shell diamond film. It also shown that although velocity and pressure fields fluctuated, which caused negative influence on the quality of diamond film, the temperature field is uniform, which is very important to grow normal diamond film, and it is in accordance with the experience results.

Keywords:

• finite element methods
• DCPJ-CVD
• microstructure
• shell diamond film

Acknowledgments

This project was supported by Education Science Foundation of Jiangxi Province (GJJ09188), Fund for the Doctoral Program of NCHU (EA200901168) and Natural Science Foundation of China (50605032).