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Articles

Low temperature processed, highly stable CMOS inverter by integrating Zn-ON and tellurium thin-film transistors

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Pages 199-204 | Received 11 Aug 2022, Accepted 17 Jan 2023, Published online: 09 Feb 2023

Figures & data

Figure 1. (a) Optical transmittance of ZnON film. The inset graph shows the extracted optical band gap. (b) AFM image of ZnON with a scan size of 5 × 5 um.

Figure 1. (a) Optical transmittance of ZnON film. The inset graph shows the extracted optical band gap. (b) AFM image of ZnON with a scan size of 5 × 5 um.

Figure 2. (a) Transfer and (b) Output curves of the proposed ZnON TFTs.

Figure 2. (a) Transfer and (b) Output curves of the proposed ZnON TFTs.

Figure 3. (a) A 3D layout of the proposed sputtering process for uniform Te-film deposition at low temperature in the presence of Ar gas flow. (b) Thickness profiles of the proposed Te-film in terms of AFM image (upside) and height profile (downside). (c) Raman spectroscopy of the deposited Te-film with an inset of Te-substrate and marking of Raman measurement point.

Figure 3. (a) A 3D layout of the proposed sputtering process for uniform Te-film deposition at low temperature in the presence of Ar gas flow. (b) Thickness profiles of the proposed Te-film in terms of AFM image (upside) and height profile (downside). (c) Raman spectroscopy of the deposited Te-film with an inset of Te-substrate and marking of Raman measurement point.

Figure 4. (a) Transfer curve of the fabricated Te-based TFT along with a schematic and real image of the TFT. (b) Output curve of the proposed Te-based TFT at VGS ranges from 10 V to −50 V with a step of −10 V.

Figure 4. (a) Transfer curve of the fabricated Te-based TFT along with a schematic and real image of the TFT. (b) Output curve of the proposed Te-based TFT at VGS ranges from 10 V to −50 V with a step of −10 V.

Figure 5. (a) A schematic layout of the hybrid Te and ZnON TFTs-based CMOS inverter device. (b) Transfer voltage and inverter gain curves of the proposed inverter device at VDD of 20 V with an inset of the schematic circuit layout. (c) and (d) Transfer voltage and inverter gain curves of the inverter device at different VDD range from 5 to 20 V with a step of 5 V. (e) Time-domain output curve measurements of the inverter device by applying VIN pulse of 20 V at VDD 20 V.

Figure 5. (a) A schematic layout of the hybrid Te and ZnON TFTs-based CMOS inverter device. (b) Transfer voltage and inverter gain curves of the proposed inverter device at VDD of 20 V with an inset of the schematic circuit layout. (c) and (d) Transfer voltage and inverter gain curves of the inverter device at different VDD range from 5 to 20 V with a step of 5 V. (e) Time-domain output curve measurements of the inverter device by applying VIN pulse of 20 V at VDD 20 V.
Supplemental material

Supplemental Material

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