Finite-element analysis of scattering parameters of surface acoustic wave bandpass filter formed on barium titanate thin film

Figures & data

Figure 1. The geometry of BaTiO₃/MgO layered two-port SAW bandpass filter.

Table 1. The parameters of SAW filter model.

Parameter	Value	Description
	400nm	Thickness of the film
	0.25nm	Thickness of the substrate
	100m	Thickness of the PML
	2m	Width of elecrodes
		Gap between electrodes
	0.18m	Thickness of electrodes
	40	Number of electrodes in IDT
	1.81mm	The distance between IDTs

Table 2. The material properties of aluminum.

Property	Symbol	Value	Unit
Density		2700	kg/m3
Young’s modulus		70	GPa
Poison ratio		0.33

Table 3. The material properties of magnesium oxide.

Property	Symbol	Value	Unit
Relative permittivity		9.8
Density		3648	kg/m3
Elasticity matrix			GPa

Figure 2. The dependence of scattering parameters (a, c) and (b, d) on the lattice misfit strain of BaTiO₃ film with thickness for first (a, b) and second (c, d) low-frequency surface acoustic resonances.

Figure 3. The dependence of scattering parameters (a, c) and (b, d) on the lattice misfit strain of BaTiO₃ film with thickness for first (a, b) and second (c, d) low-frequency surface acoustic resonances.

Figure 4. The dependence of scattering parameters (a) and (b) on the BaTiO3 film thickness , and with the misfit strain .