Figures & data
Figure 1. Main internal structure of pressure sensor (a) stress cup based on sapphire substrate and (b) diffusion pressure sensitive silicon resistor.
Figure 2. Pressure sensor and data processing circuit.
Figure 3. Simulated pressure test system.
Figure 4. Output voltage of pressure sensor Vp at different standard temperatures for different standard pressures.
Figure 5. Temperature coefficient as function of pressure values.
Figure 6. Temperature compensated voltage of pressure sensor.
Figure 7. Pressure sensor error under different standard pressure values.
Figure 8. Response speed between platinum resistance and output voltage.
Figure 9. Deep sea profile test.
Figure 10. Data comparison with different sensors (a) Pressure measurement at about 4000 m depth and (b) about 3000 m depth.
Figure 11. Data comparison with different sensors (a) Pressure measurement at about 2000 m depth and (b) about 1000 m depth.
