Figures & data
Table 1. The grain sizes of the 500°C-annealed MZxNO films
Table 2. The area ratio of the XPS peaks of the 400°C-annealed MZxNO films
Figure 4. XPS core spectra of the (a) Mg 2p, (b) Zn 2p, (c) O 1s and (d) Nb 3d signals of the400°C-annealedMZxNO films
![Figure 4. XPS core spectra of the (a) Mg 2p, (b) Zn 2p, (c) O 1s and (d) Nb 3d signals of the400°C-annealedMZxNO films](/cms/asset/cb108ba0-c087-4fb2-a372-8fe11abf0a7a/tace_a_1863575_f0004_b.gif)
Figure 6. (a) C-V and(b) tanδ-V relations of the Al/MZxNO/ITO/glass MIM capacitors annealed at 400°C
![Figure 6. (a) C-V and(b) tanδ-V relations of the Al/MZxNO/ITO/glass MIM capacitors annealed at 400°C](/cms/asset/40c0edfb-bd50-4d78-8a1f-ba1f51fa67d7/tace_a_1863575_f0006_b.gif)
Figure 9. The double logarithmic I–V relations of the Al/MZxNO/ITO/glass MIM capacitors annealed at 400°C
![Figure 9. The double logarithmic I–V relations of the Al/MZxNO/ITO/glass MIM capacitors annealed at 400°C](/cms/asset/91f64fda-ad41-4358-a16f-ee94616ea1c0/tace_a_1863575_f0009_oc.jpg)
Table 3. Summary of the conduction mechanisms of MZxNO samples
Table 4. The calculated values of the band diagram and EFN of the MZxNO samples