The effect of SiC coatings microstructure on their infrared emissivity

Figures & data

Figure 1. Schematic diagram of CVD reactor.

Table 1. Deposition parameters.

Parameters	1#	2#	3#
Total pressure	7kPa	10kPa	12kPa
Molar ratio of H2 to MTS	10	8	6
Deposition temperature	1300°C	1290°C	1270°C

Figure 2. Schematic diagram of infrared emissivity calibration process.

Figure 3. X-ray diffraction spectra of SiC coatings.

Figure 4. Three-dimensional topography of SiC coatings.

Figure 5. Average roughness of SiC coatings.

Figure 6. SEM images of SiC coatings.

Figure 7. Infrared emissivity of SiC coatings.

Figure 8. Dispersion relation curve of light wave propagation in vacuum and surface electromagnetic wave on SiC surface.