Figures & data
Figure 2. XRD profiles of diamond epilayer/p+-diamond substrate structure. (a) X-ray rocking curve and (b) 2θ-ω scan profiles of 004 diamond reflection.
![Figure 2. XRD profiles of diamond epilayer/p+-diamond substrate structure. (a) X-ray rocking curve and (b) 2θ-ω scan profiles of 004 diamond reflection.](/cms/asset/d745c60f-f35b-45c2-bce2-3796ef66c52f/tfdi_a_2150526_f0002_c.jpg)
Figure 3. Raman spectra. Black, blue, and red lines correspond to the spectra of p+-diamond substrate, 0.5-μm thick diamond epilayer, and 1.6-μm thick diamond epilayer, respectively.
![Figure 3. Raman spectra. Black, blue, and red lines correspond to the spectra of p+-diamond substrate, 0.5-μm thick diamond epilayer, and 1.6-μm thick diamond epilayer, respectively.](/cms/asset/c89ddd2c-a078-44f8-a7bd-aa37791c5082/tfdi_a_2150526_f0003_c.jpg)
Figure 4. I-V characteristics of diamond-based vertical-type SBPD. Black and violet open circles correspond to dark and 220-nm DUV light illumination characteristics, respectively. The inset shows the equivalent circuit used for the fit. The solid line is the fitted curve.
![Figure 4. I-V characteristics of diamond-based vertical-type SBPD. Black and violet open circles correspond to dark and 220-nm DUV light illumination characteristics, respectively. The inset shows the equivalent circuit used for the fit. The solid line is the fitted curve.](/cms/asset/431ca736-9ba3-4e4f-83d8-cf81055a1bb6/tfdi_a_2150526_f0004_c.jpg)
Figure 5. Spectral response characteristics. (a) Sensitivity as a function of wavelength, (b) response property, and (c) light angle dependence on the photocurrent.
![Figure 5. Spectral response characteristics. (a) Sensitivity as a function of wavelength, (b) response property, and (c) light angle dependence on the photocurrent.](/cms/asset/28da03b0-370d-4c84-b079-d8302fe2a620/tfdi_a_2150526_f0005_c.jpg)