Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing

Figures & data

Figure 1. Schematic illustration of the possible modes for matrix ellipsometer processes of MCD films.

Figure 2. Experimental and fitted values of φ and Δ values for samples with Un-implanted, As-implanted, B-MCD-700, B-MCD-800 and B-MCD-900, respectively.

Figure 3. The variation of index of refraction (n) and extinction coefficient (k) with incident wavelength and photo energy for samples (a) Un-implanted, (b) As-implanted, (c) B-MCD-700, (d) B-MCD-800 and (e) B-MCD-900, respectively. FESEM micrographs and corresponding AFM three-dimensional stereographs of samples (f-F) Un-implanted, (g-G) As-implanted, (h-H) B-MCD-700, (i-I) B-MCD-800 and (j-J) B-MCD-900, respectively.

Table 1. The values of thickness, roughness and EMA from SE test fitting information and the data of R_a and R_q obtained from AFM.

sample	Ellipsometry			AFM
	Thickness (nm)	Roughness (nm)	EMA (nm)	Ra (nm)	Rq (nm)
Un-implanted	461.8	32.3	35.3	35.7	46.7
As-implanted	473.0	30.2	34.1	30.8	40.0
B-MCD-700	486.3	33.6	40.0	34.7	44.8
B-MCD-800	474.7	37.4	42.3	35.8	47.1
B-MCD-900	478.8	40.1	46.4	37.0	48.0

Figure 4. (a) Typical visible Raman spectra from Un-implanted, As-implanted, B-MCD-700, B-MCD-800 and B-MCD-900 samples, (b) the ratio of I_TPA/I_SUM and I_D/I_G values, (c) the diamond peak position and its FWHM values, and (d) the G band position and its FWHM.

Figure 5. Typical C1s core-energy level spectra and boron ion implanted samples after annealing at different temperature.