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Research Article

The 4-inch free-standing diamond film prepared by MPCVD at 10kW

, , , , &
Article: 2356570 | Received 13 Nov 2023, Accepted 10 May 2024, Published online: 22 May 2024

Figures & data

Figure 1. The principle of plasma emission spectroscopy measurement.

Figure 1. The principle of plasma emission spectroscopy measurement.

Figure 2. The plasma emission spectroscopy of 3% methane and 97% hydrogen.

Figure 2. The plasma emission spectroscopy of 3% methane and 97% hydrogen.

Figure 3. The spectral line intensities of Hα and C2 variation radially across the plasma.

Figure 3. The spectral line intensities of Hα and C2 variation radially across the plasma.

Figure 4. SEM of diamond morphology at positions P0, P2, P4 and P5.

Figure 4. SEM of diamond morphology at positions P0, P2, P4 and P5.

Figure 5. The growth rate of diamond films variation radially along the plasma.

Figure 5. The growth rate of diamond films variation radially along the plasma.

Figure 6. Raman spectra of diamonds at positions P0, P2, P4 and P5.

Figure 6. Raman spectra of diamonds at positions P0, P2, P4 and P5.

Figure 7. Diamond film with diameter of 4 inches.

Figure 7. Diamond film with diameter of 4 inches.

Figure 8. The ultraviolet-visible-near-infrared transmittance spectrum of diamond.

Figure 8. The ultraviolet-visible-near-infrared transmittance spectrum of diamond.