Thickness dependent properties of diamond-like carbon coatings by filtered cathodic vacuum arc deposition

Abstract

Diamond-like carbon (DLC) coatings of 300, 500 and 650 nm thickness were deposited on stainless steel substrates using a filtered cathodic vacuum arc hybrid with magnetron sputtering system. A 100 nm thick chromium interlayer was deposited before the deposition of the DLC coatings. The films morphology was characterised by field emission scanning electron microscopy and structure was identified by Raman spectroscopy. Tribology was evaluated by ball disc wear test and wear tracks were observed by scanning electron microscopy. The interface adhesion was studied by scratch tester. The results of all characterisations were concluded and 500 nm DLC coating has suggested as optimum thickness that would be applicable for industrial applications.

Keywords:

• Diamond-like carbon
• Coating
• Plasma etching
• Sputtering
• Filtered cathodic vacuum arc
• Adhesion
• Tribology

Acknowledgements

This Research was supported by Basic Science Research Program through the National Research Foundation of Korea funded by Ministry of Education, Science and Technology under grant nos. 2012-0008302 and 2012-0009455.