Piezoelectric 1–3 Composites for High Frequency Ultrasonic Transducer Applications

Abstract

A new net shape process has been developed to fabricate 1–3 piezocomposites. Solid polymer moulds and high solid loading lead zirconate titanate (PZT) paste, made by the viscous polymer processing (VPP), have been utilised in an embossing/lost mould method. 1–3 structures with PZT pillar feature sizes of 50–100 μm and aspect ratios of 5–10 have been fabricated successfully, and the composites have been characterized by electrical impedance and pulse-echo measurements. The results show that the viscous polymer processing is a very promising technique for the fabrication of 1–3 composites for high frequency ultrasonic transducer applications.

Keywords:

• PZT
• 1–3 composites
• lost mould method
• high frequency
• ultrasonic transducer