The piezoelectric ceramic tubular transducer is a functional component of the cylindrical ultrasonic micromotor. In this paper, electrophorectic deposition (EPD) method was employed to fabricate the tubular transducer using a modified hard PZT ceramic material 0.95Pb(Zr0.52Ti0.48)O3 · 0.03BiFeO3 · 0.02Ba(Cu0.5 W0.5)O3 + 0.5 wt%MnO2. Characterization of the piezoelectric tube was performed using SEM and X-ray radiography. The piezoelectric constant d 31 of the tubular transducer was also determined to be 5.58 × 10−11 m/v using a ferroelectric tester and a fotonic sensor. The equations for static bending displacement with clamped-free and free-free end conditions were theoretically developed, analyzed and experimentally verified.
Ferroelectrics
Volume 315, 2005 - Issue 1
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