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SECTION J: APPLICATIONS AND DEVICES

Measurements of Piezoelectric Properties of Ferroelectric Thick Films by Fotonic Sensor

, , , &
Pages 171-178 | Received 06 Sep 2004, Published online: 09 Mar 2011
 

Abstract

A development of method of piezoelectric measurements of thick film and bulk samples by a commercially available Fotonic Sensor TM is reported. The main problem of using this technique is a high requirement to the electrode quality and an overestimation of the piezoelectric coefficients due to bending effects. In this work, both problems were successfully solved by using special mechanical interface (cantilever beam) that transfers mechanical displacement from the moving piezoelectric surface to the mirror. The capabilities of the piezoelectric measurement setup are validated by the measurements in both bulk ceramics and thick Pb(Zr,Ti)O3 films.

Acknowledgments

N. Vyshatko would like to acknowledge Portuguese Foundation for Science and Technology (FCT) for the financial support through his grant (SFRH/BPD/15004/2004).

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