Thermometric properties of the capacitance temperature sensor with polycrystalline (Sr1−x Cax)TiO3 (x = 0.05) have been investigated at cryogenic temperatures. Ferroelectric state appeared at 31.8 K due to Ca doping. Temperature sensitivity S and dimensionless temperature sensitivity Sd at 2.5 K were 90 pF/K and 0.045, respectively. This capacitance temperature sensor could improve the accuracy of temperature sensing at cryogenic temperatures due to its large dimensionless temperature sensitivity.
Capacitance Temperature Sensor Using Ferroelectric (Sr0.95Ca0.05)TiO3 Perovskite
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