Abstract
Thin films of Pb(Mg 1/3 ,Nb 2/3 )O 3 -PbTiO 3 (PMN-PT) were fabricated on Pt/Ti/SiO 2 /Si substrates by ultrasonic spraying MOCVD and their characteristics were investigated. The content of pyrochlore phase in PMN-PT films decreased with the increase of PT content and nearly single perovskite films were obtained at the composition of 80PMN-20PT. The 70PMN-30PT films with perovskite phase showed a typical butterfly type C-V curve which verifies the ferroelectricity and had the relative dielectric constant of about 500 and the resistivity of about 5 × 10 12 Ω · cm.
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Acknowledgments
Paper originally presented at IMF-11, Iguassu Falls, Brazil, September 5–9, 2005