Study on the Ferroelectric Thin Films for Uncooled Infrared Detection

Abstract

Some results on the microstructure controlling and characterization of ferroelectric thin films for uncooled infrared detections are presented. Several novel technologies have been developed to control the microstructures, e.g., grain size, grain shape, and the texture of BST, PZT thin films as well as to fabricate PZT thin films at low temperature. 256 × 1 pixels infrared detector has been prepared and used to realize infrared thermal image. A highly self-polarization in PMNT relaxor films has been observed. A novel readout method with infrared-visible transition mechanism is also discussed.

Keywords:

• Ferroelectric thin films
• microstructure controlling
• uncooled infrared detection

Acknowledgments

This work was supported by National Natural Science Foundation (Grant No. 60221502) and Science and technology commission of Shanghai Municipality (Grant No. 03JC14076).