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Ferroelectrics Volume 370, 2008 - Issue 1
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SECTION L: THIN FILMS AND SUPERLATTICES

Preparation of Epitaxial Pt Bottom Electrode and Tunability of (Ba,Sr)TiO3 Thin Film Deposited on Si Substrate

Naoki Wakiya Department of Materials Science and Chemical Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, 432-8561, Japan
,
Akinori Higuchi Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, 152-8550, Japan
,
Naonori Sakamoto Department of Materials Science and Chemical Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, 432-8561, Japan
,
Nobuyasu Mizutani Tokyo National College of Technology, 1220-2, Kunugida-machi, Hachioji-shi, Tokyo, 193-0997, Japan
,
Takanori Kiguchi Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, 980-8577, Japan
,
Hisao Suzuki Graduate School of Science and Technology, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu, 432-8561, Japan
&
Kazuo Shinozaki Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, 152-8550, Japan
 show all
Pages 132-139 | Received 05 Sep 2007, Published online: 20 Sep 2010
 
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Abstract

(001) oriented epitaxial Pt bottom electrode was prepared on Si(001) substrate using four fold buffer layer of ST/LSCO/CeO 2 /YSZ. On the epitaxial Pt bottom electrode, we found that both epitaxial and polycrystalline BST thin film can be prepared by the change of oxygen gas flow procedure during heating up to deposition temperature of BST. Without oxygen gas flow on the heating process of the Pt bottom electrode, BST thin film was changed into polycrystalline, on the other hand, when the Pt bottom electrode was heated in 100 mTorr of oxygen pressure, epitaxial grown BST thin film was realized. This means that the orientation of BST thin film can be controlled by the oxygen flow procedure during heating of the Pt bottom electrode. Dielectric constant and tunability of epitaxial BST thin film changed with the oxygen pressure during heating and deposition of BST thin film. This suggests that oxygen pressure during heating and deposition is the key to control the orientation and properties of BST thin film.

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