Functional Ultrathin Capacitors Obtained By Chemical Solution Deposition with Tailored Grain Size

Abstract

In this work we present a study on the preparation of functional capacitors, i.e. without electrical shorts, from ultrathin PbTiO₃ films obtained by Chemical Solution Deposition methods with tailored grain sizes. The use of different diols during the synthesis stage prove to be successful to produce fine grained films at the optimum crystallization conditions that prevent the presence of detrimental secondary phases. Besides the importance of avoiding any film damage during the electrode deposition, we show that the grain size to thickness ratio is a determinant factor to successfully prepare functional capacitors down to a thickness of 34 nm.

Acknowledgments

This work is part of the activities of the European network of excellence “Multifunctional and Integrated Piezoelectric Devices MIND” (NoE 515757) and it has been partially funded by the Spanish project MAT2007-61409. Authors wish to thank Prof. J. Piqueras for the access to the facilities of the Microelectronics Laboratory of the Universidad Autónoma de Madrid.