Advanced search
Publication Cover
Ferroelectrics Volume 408, 2010 - Issue 1
Submit an article Journal homepage
111
Views
2
CrossRef citations to date
0
Altmetric
SECTION J: PIEZOELECTRICS AND APPLICATIONS

Effect of Metal Buffer Layer on Surface Acoustic Wave in AlN/Diamond Structure

Chia-Chi Sung Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Section 4, Roosevelt Rd., Da-an District, Taipei County, Taiwan, Republic of China
,
Yuan-Feng Chiang Department of Engineering Science and Ocean Engineering, National Taiwan University, 1, Section 4, Roosevelt Rd., Da-an District, Taipei County, Taiwan, Republic of China
,
Ruyen Ro Department of Electrical Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd. Ta-Hsu Hsiang, Kaohsiung County, Taiwan
,
Ruyue Lee Department of Electrical Engineering, I-Shou University, 1, Section 1, Hsueh-Cheng Rd. Ta-Hsu Hsiang, Kaohsiung County, Taiwan
&
Sean Wu Department of Electronics Engineering and Computer Science, Tung-Fang Institute of Technology, 110, Tung-Fung Road, Hunei Shiang, Kaohsiung, Taiwan, Republic of China
Pages 25-31 | Received 23 Aug 2009, Accepted 08 Oct 2009, Published online: 01 Dec 2010
 
Sample our Physical Sciences journals, sign in here to start your FREE access for 14 days

Abstract

This study investigates the propagation characteristics of surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures using the finite element method. Propagation characteristics in AlN/thin metal film/diamond and AlN/diamond structures are also evaluated for comparison. Results indicate that by adding the Mo layer at the AlN/diamond interface, the maximum coupling coefficient can be upgraded to 2.24%, which is 5% and 81% higher than that of AlN/thin metal film/diamond and AlN/diamond structures, with a very high phase velocity of 10745 m/s. The effects of electrodes on surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures are also discussed.

Acknowledgment

The authors would like to thank the National Science Council of the Republic of China for financially supporting of this research under Contracts NSC 98-2221-E-002-195 and NSC 98-2221-E-214-019.

Log in via your institution

Access through your institution

Log in to Taylor & Francis Online

Restore content access

Restore content access for purchases made as guest
Purchase options * Save for later

PDF download + Online access

  • 48 hours access to article PDF & online version
  • Article PDF can be downloaded
  • Article PDF can be printed
USD 61.00 Add to cart

Issue Purchase

  • 30 days online access to complete issue
  • Article PDFs can be downloaded
  • Article PDFs can be printed
USD 2,630.00 Add to cart

* Local tax will be added as applicable

Related Research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.