Abstract
This study investigates the propagation characteristics of surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures using the finite element method. Propagation characteristics in AlN/thin metal film/diamond and AlN/diamond structures are also evaluated for comparison. Results indicate that by adding the Mo layer at the AlN/diamond interface, the maximum coupling coefficient can be upgraded to 2.24%, which is 5% and 81% higher than that of AlN/thin metal film/diamond and AlN/diamond structures, with a very high phase velocity of 10745 m/s. The effects of electrodes on surface acoustic waves in interdigital transducer/AlN/Mo/diamond structures are also discussed.
Acknowledgment
The authors would like to thank the National Science Council of the Republic of China for financially supporting of this research under Contracts NSC 98-2221-E-002-195 and NSC 98-2221-E-214-019.