Design and Characteristics of Bar Type Piezoelectric Micropump

Abstract

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized along the thickness direction. The proposed structure for the piezo-pump consists of the input and output ports the piezoelectric ceramic actuator, the actuator support, and the diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results.

Keywords:

• Piezopump
• elliptic motion
• peristaltic traveling wave
• z-displacement
• pumping rate

Acknowledgments

This research was supported by Basic Science Research Program through the National Research Foundation of Korea(NRF) funded by the Ministry of Eduction, Science and Technology(KRF-2008-313-D00376)