Abstract
TEM study of PZT thin films prepared by sol-gel techniques on Si - SiO2 - Ti—Pt substrates is presented. The films are subjected to a heat treatment at 650°C. Structural changes are studied in relation to lead excess in initial solution varied through a wide range from 5 to 50 mol. %. Main trends in microstructure transformation connected with the lead content are reported.
Acknowledgments
The work is supported by the grants of program of Ministry of Science and Education and RFBR N 12-02-01363-a.