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Ferroelectrics Volume 496, 2016 - Issue 1: Proceedings of International Workshop Modern Nanotechnology (IWMN-2015)_
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Original Articles

Optical and structural properties of ZnO thin films after laser treatment

V. S. LevitskiiSaint Petersburg Electrotechnical University “LETI,”Saint Petersburg, Russia;R&D Center of Thin Film Technologies in Energetics under Ioffe Institute LLC, Saint Petersburg, Russia;A.F. Ioffe Physical-Technical Institute of the Russian Academy of Sciences, Saint Petersburg, Russia
,
D. N. RedkaSaint Petersburg Electrotechnical University “LETI,”Saint Petersburg, RussiaCorrespondence[email protected]
&
E. I. TerukovSaint Petersburg Electrotechnical University “LETI,”Saint Petersburg, Russia;R&D Center of Thin Film Technologies in Energetics under Ioffe Institute LLC, Saint Petersburg, Russia;A.F. Ioffe Physical-Technical Institute of the Russian Academy of Sciences, Saint Petersburg, Russia
Pages 163-169 | Received 29 Aug 2015, Accepted 30 Oct 2015, Published online: 15 Apr 2016
 
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abstract

Recently, much work has been done to improve the optical and electrical properties of zinc oxide (ZnO) films. A comprehensive study of optical properties (transmittance and scattering), electrical properties (carrier mobility, carrier concentration, conductivity, and resistance), and surface topography allows to give recommendations for optimizing the process of obtaining layers with the parameters enabling their use in thin film solar modules. Parameters of the conductive layers can be changed by the method of doping with boron zinc oxide films, ion etching, and laser annealing.

Funding

The study was supported by the grant of Russian Science Foundation (project 14-12-00327).

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