Role of residual stress on phase transformations of Pb(Zr_0.50Ti_0.50)O₃ thin films obtained from chemical route

abstract

The effects of heat treatment on the phase transformations of lead zirconate titanate Pb(Zr_0.50Ti_0.50)O₃ (PZT) thin films were studied. The pyrolysis temperature directly affected the densification, residual stresses, and suppression of the pyrochlore phase observed in the studied films. The evolution of the crystalline phases and the residual stress were characterized by different temperatures of pyrolysis in PZT thin films, using the X-ray diffraction technique. The phase transformations in the films are discussed in terms of theoretical and experimental calculations of residual stress.

KEYWORDS:

• PZT thin films
• phase transformation
• residual stress

Funding

We express our gratitude to the Brazilian agencies FAPESP (Projects: 2010/16504-0 and 2007/08534–3) and CNPq (Research grant: 305973/2012–6 and Projects: 400677/2014–8 and 483445/2013–4) for their financial support.