Evaluation of shear piezoelectric coefficient d₁₅ of piezoelectric ceramics by using piezoelectric cantilever beam in dynamic resonance

ABSTRACT

A novel method for characterization on the shear piezoelectric coefficient of piezoelectric ceramics was proposed. A shear-mode piezoelectric cantilever with coplanar electrode structure was fabricated via arranging two PZT-51 elements poled opposite in series connection, and a principle model based on Timoshenko beam theory was proposed to establish the relationship between peak-to-peak output voltage and frequency. The measured values are in good agreement with the results simulated by finite element method (FEM) with maximum relative error less than 4.5%. It is reliable and convenient for the proposed method to characterize the shear piezoelectric coefficient of piezoelectric ceramics.

KEYWORDS:

• Shear-mode piezoelectric cantilever
• shear piezoelectric coefficient
• dynamic resonance
• piezoelectric ceramics

Funding

This work was supported by National Natural Science Foundation of China (51272158 and 11402149), Changjiang Scholar Incentive Program ([2009]17), Natural Science Foundation of Shanghai (14ZR1428000), and Shanghai Talent Development Funding and the Hujiang Foundation of China (B14006).