Dielectric properties for strontium barium titanate thin films with different thickness

ABSTRACT

In this work, Sr_0.5Ba_0.5TiO₃ (SBT) thin films with different thickness were prepared on a Pt/SiO₂/Si substrate by sol-gel process. The microstructures of SBT thin films were examined by X-ray diffraction(XRD) and trans- mission electron microscopy (TEM). Morphologies of samples were characterized by field-emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM). The influences of thickness on the microstructure and dielectric properties of SBT thin films were also studied. It is found that tetragonal perovskite crystal grains existed in SBT thin films. The results indicated that the optimum thickness is 450 nm for SBT thin films.

KEYWORDS:

• SBT
• thin films
• dielectric constant
• dielectric loss

Additional information

Funding

This work was financially supported by Heilongjiang Province Natural Sciences Foundation (F200927), Heilongjiang Province and Program for Innovative Research Team in University of Heilongjiang Province (2013TD008) and the Science and Technology Innovation Special Foundation of Harbin (2008RFQXG070).