E-beam domain patterning in thin plates of MgO-doped LiNbO₃

Abstract

The features of the domain patterning in thin lithium niobate crystals were studied. It was shown that decrease in crystal plate thickness led to domain size increase due to limitation of forward growth. The domain size weakly depended on electron energy due to equality of screening charge value at the same doses and various accelerating voltages. The weak dependence of domain sizes on pattern period was attributed to absence of electrostatic interaction of domain walls. The possibility of creation of the through periodical domain structures with the vertical domain walls and period down to 2 μm in thin crystal was demonstrated.

Keywords:

• Lithium niobate
• thin crystals
• electron beam patterning

Acknowledgment

The equipment of the Ural Center for Shared Use “Modern nanotechnology” UrFU was used.

Additional information

Funding

The research was made possible by the Russian Science Foundation (grant No 17-72-10152).