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Abstract
The Internet of things (IoT) is gaining popularity due to diverse applications and market potential. They are pushed more into remote locations and developers look for a perpetual power source. The vibration energy harvester (EH) is capable to mitigate powering issues. Zinc oxide (ZnO), Polydimethylsiloxane (PDMS) and Silver (Ag) were used. However, it is observed that film grains size has a great impact i.e. large-grained films are superior to small-grained films. This work analyses impacting parameters and relevant empirical study. Scanning-Electron-Microscope (SEM), X-ray Diffraction (XRD), Electrical characterization were carried out for in-depth analysis. It is observed that 46.92 µWpeak/15.03 µWrms power is achieved in this work.
Acknowledgment
We acknowledge the National MEMS Design Center funded by ADA under NPMASS program, VNIT, Nagpur, Material Science Department, Indian Institute of Technology (IIT), Powai, Luminance Research Lab, RCOEM, Nagpur, Dr. Deepak Khushlani, Mr. Rupesh Talewar, Manish Bhaiyya, RCOEM, Nagpur, Ms. Vandana Jain, Mr. T. Pravin Raj, Mr. Rajesh Junghare, VNIT, Nagpur, Young Faculty Research Scheme, RCOEM, Nagpur.