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Abstract
Thin polycrystalline lead zirconate titanate (PZT) films with a Zr:Ti ratio close to morphotropic phase boundary were obtained by radiofrequency sputtering at a temperature of 540 °C on a metal substrate, and their structural and electrophysical properties were studied. The piezoelectric coefficient, remnant polarization, coercive field, and dielectric constant of the PZT film are 3.84 μC/cm2, 1.20 ÷ 1.26 μC/cm2, 1.1 ÷ 1.3·105 V/cm, and 145, respectively. Domains of the perovskite phase are located on the surface of the film protrusions. The magnitude of the piezoelectric modulus of the domain is 17.9 ÷ 22.4 pC/V.
Acknowledgments
The authors are grateful to M. V. Il'ina for help in carrying out AFM and PFM measurements.
Additional information
Funding
This work was supported by the RFBR grant No. 18-29-11019-mk. This work was partially supported by the state assignment of the Ministry of Education and Science of Russia in the field of scientific activity No. 0852-2020-0015.