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Research Article

Ferroelectric properties of Sr0.5Ba0.5Nb2O6 thin films grown on a Si(001) substrate by RF cathode sputtering

, , , , , , & show all
Pages 135-141 | Received 24 Aug 2022, Accepted 12 Jan 2023, Published online: 07 Mar 2023
 

Abstract

Using the RF cathode sputtering method, ferroelectric films of barium-strontium niobate Sr0.5Ba0.5Nb2O6 were synthesized on a semiconductor substrate. Their phase composition, crystal structure, nanostructure, dielectric, and ferroelectric characteristics were studied. The temperature ranges of phase transformations, the characteristic values of spontaneous polarization and coercive fields, the magnitude and nature of the change in the imaginary and real parts of the complex permittivity in the temperature range −190 ÷ 250 °C were established in the films. The reasons for the revealed regularities are discussed.

Additional information

Funding

The work was carried out within the framework of the SSC RAS state task (project number 122020100294-9).

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