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Pb(ZrxTi1–x)O3 (PZT), Bi4Ti3O12 and BaTiO3 films as well as SrTiO3 films are considered for nonvolatile memory applications and high density dynamic random access memories. These perovskite systems are frequently deposited by a sol-gel or MOD technique. Processing and the properties of the thin films are summarized.
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